THE TRIBOLOGICAL PROPERTIES OF MOS2 COATINGS IN VACUUM, LOW RELATIVE-HUMIDITY, AND HIGH RELATIVE-HUMIDITY ENVIRONMENTS

被引:74
作者
PANITZ, JKG
POPE, LE
LYONS, JE
STALEY, DJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期
关键词
D O I
10.1116/1.575669
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:1166 / 1170
页数:5
相关论文
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