REVIEW OF RAPID THERMAL ANNEALING OF ION-IMPLANTED GAAS

被引：29

作者：

GILL, SS

SEALY, BJ

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 12期

关键词：

D O I：

10.1149/1.2108477

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2590 / 2596

页数：7

共 57 条

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