DEPENDENCE OF GLOW-DISCHARGE SI-H-CL FILM MORPHOLOGY ON DILUENT GAS AND SICL4 PARTIAL-PRESSURE

被引：5

作者：

DANESH, P

KALITZOVA, M

PANTCHEV, B

SIMOV, S

DEBLASI, C

VITALI, G

ROSSI, M

机构：

[1] UNIV LA SAPIENZA,DEPT ENERGET,I-00161 ROME,ITALY

[2] UNIV LECCE,DEPT PHYS,I-73100 LECCE,ITALY

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 47卷 / 03期

关键词：

D O I：

10.1007/BF00615936

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：301 / 307

页数：7

共 18 条

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