THE EFFECTS OF OXYGEN-ARGON MIXING ON PROPERTIES OF SPUTTERED SILICON DIOXIDE FILMS

被引：29

作者：

SUYAMA, S

OKAMOTO, A

SERIKAWA, T

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 09期

关键词：

D O I：

10.1149/1.2100867

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2260 / 2264

页数：5

共 14 条

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