STICKING AND RECOMBINATION OF THE SIH3 RADICAL ON HYDROGENATED AMORPHOUS-SILICON - THE CATALYTIC EFFECT OF DIBORANE

被引:152
作者
PERRIN, J [1 ]
TAKEDA, Y [1 ]
HIRANO, N [1 ]
TAKEUCHI, Y [1 ]
MATSUDA, A [1 ]
机构
[1] ELECTROTECH LAB,TSUKUBA,IBARAKI 305,JAPAN
关键词
D O I
10.1016/0039-6028(89)90106-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:114 / 128
页数:15
相关论文
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