STICKING AND RECOMBINATION OF THE SIH3 RADICAL ON HYDROGENATED AMORPHOUS-SILICON - THE CATALYTIC EFFECT OF DIBORANE

被引：152

作者：

PERRIN, J ^{[1
]}

TAKEDA, Y ^{[1
]}

HIRANO, N ^{[1
]}

TAKEUCHI, Y ^{[1
]}

MATSUDA, A ^{[1
]}

机构：

[1] ELECTROTECH LAB,TSUKUBA,IBARAKI 305,JAPAN

来源：

SURFACE SCIENCE | 1989年 / 210卷 / 1-2期

关键词：

D O I：

10.1016/0039-6028(89)90106-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：114 / 128

页数：15

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