TIN HARD COATINGS DEPOSITED ON HIGH-SPEED STEEL SUBSTRATES BY REACTIVE DIRECT-CURRENT MAGNETRON SPUTTERING

被引：14

作者：

SCHILLER, S

BEISTER, G

RESCHKE, J

HOETZSCH, G

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574949

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2180 / 2183

页数：4

共 19 条

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[8]

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