TIN HARD COATINGS DEPOSITED ON HIGH-SPEED STEEL SUBSTRATES BY REACTIVE DIRECT-CURRENT MAGNETRON SPUTTERING

被引:14
作者
SCHILLER, S
BEISTER, G
RESCHKE, J
HOETZSCH, G
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词
D O I
10.1116/1.574949
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:2180 / 2183
页数:4
相关论文
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