共 13 条
[2]
MODELING OF REACTIVE SPUTTERING OF COMPOUND MATERIALS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (02)
:202-207
[3]
PROCESS MODELING OF REACTIVE SPUTTERING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1989, 7 (03)
:1225-1229
[8]
THE ATOMIC ARRANGEMENT OF INTERSTITIALS IN MOLYBDENUM ORDERED SOLUTIONS
[J].
METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE,
1992, 23 (06)
:1601-1606
[10]
TIOX FILM FORMATION PROCESS BY REACTIVE SPUTTERING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
1992, 10 (04)
:1483-1487