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LASER QUENCHED AND IMPURITY INDUCED METASTABLE SI(111)1X1 SURFACES
被引:14
作者
:
CHABAL, YJ
论文数:
0
引用数:
0
h-index:
0
CHABAL, YJ
ROWE, JE
论文数:
0
引用数:
0
h-index:
0
ROWE, JE
CHRISTMAN, SB
论文数:
0
引用数:
0
h-index:
0
CHRISTMAN, SB
机构
:
来源
:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY
|
1982年
/ 20卷
/ 03期
关键词
:
D O I
:
10.1116/1.571454
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:763 / 769
页数:7
相关论文
共 73 条
[61]
CALCULATION OF THE DYNAMICS OF SURFACE MELTING DURING LASER ANNEALING
SURKO, CM
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
SURKO, CM
SIMONS, AL
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
SIMONS, AL
AUSTON, DH
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
AUSTON, DH
GOLOVCHENKO, JA
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
GOLOVCHENKO, JA
SLUSHER, RE
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
SLUSHER, RE
VENKATESAN, TNC
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
VENKATESAN, TNC
[J].
APPLIED PHYSICS LETTERS,
1979,
34
(10)
: 635
-
637
[62]
REASONS TO BELIEVE PULSED LASER ANNEALING OF SI DOES NOT INVOLVE SIMPLE THERMAL MELTING
VANVECHTEN, JA
论文数:
0
引用数:
0
h-index:
0
机构:
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
VANVECHTEN, JA
TSU, R
论文数:
0
引用数:
0
h-index:
0
机构:
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
TSU, R
SARIS, FW
论文数:
0
引用数:
0
h-index:
0
机构:
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
SARIS, FW
HOONHOUT, D
论文数:
0
引用数:
0
h-index:
0
机构:
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
HOONHOUT, D
[J].
PHYSICS LETTERS A,
1979,
74
(06)
: 417
-
421
[63]
LASER ANNEALING SI COVERED WITH A METAL-FILM - TEST FOR GROWTH FROM THE MELT
VANVECHTEN, JA
论文数:
0
引用数:
0
h-index:
0
VANVECHTEN, JA
[J].
PHYSICAL REVIEW LETTERS,
1981,
47
(04)
: 283
-
283
[64]
VANVECHTEN JA, 1980, J PHYS-PARIS, V41, P15
[65]
THEORETICAL-ANALYSIS OF THERMAL AND MASS-TRANSPORT IN ION-IMPLANTED LASER-ANNEALED SILICON
WANG, JC
论文数:
0
引用数:
0
h-index:
0
WANG, JC
WOOD, RF
论文数:
0
引用数:
0
h-index:
0
WOOD, RF
PRONKO, PP
论文数:
0
引用数:
0
h-index:
0
PRONKO, PP
[J].
APPLIED PHYSICS LETTERS,
1978,
33
(05)
: 455
-
458
[66]
VIDICON-CAMERA PARALLEL-DETECTION SYSTEM FOR ANGLE-RESOLVED ELECTRON-SPECTROSCOPY
WEEKS, SP
论文数:
0
引用数:
0
h-index:
0
机构:
Bell Laboratories, Murray Hill
WEEKS, SP
ROWE, JE
论文数:
0
引用数:
0
h-index:
0
机构:
Bell Laboratories, Murray Hill
ROWE, JE
CHRISTMAN, SB
论文数:
0
引用数:
0
h-index:
0
机构:
Bell Laboratories, Murray Hill
CHRISTMAN, SB
CHABAN, EE
论文数:
0
引用数:
0
h-index:
0
机构:
Bell Laboratories, Murray Hill
CHABAN, EE
[J].
REVIEW OF SCIENTIFIC INSTRUMENTS,
1979,
50
(10)
: 1249
-
1255
[67]
SUPERSATURATED SUBSTITUTIONAL ALLOYS FORMED BY ION-IMPLANTATION AND PULSED LASER ANNEALING OF GROUP-III AND GROUP-V DOPANTS IN SILICON
WHITE, CW
论文数:
0
引用数:
0
h-index:
0
WHITE, CW
WILSON, SR
论文数:
0
引用数:
0
h-index:
0
WILSON, SR
APPLETON, BR
论文数:
0
引用数:
0
h-index:
0
APPLETON, BR
YOUNG, FW
论文数:
0
引用数:
0
h-index:
0
YOUNG, FW
[J].
JOURNAL OF APPLIED PHYSICS,
1980,
51
(01)
: 738
-
749
[68]
DYNAMICS OF DENSE LASER-INDUCED PLASMAS
YOFFA, EJ
论文数:
0
引用数:
0
h-index:
0
YOFFA, EJ
[J].
PHYSICAL REVIEW B,
1980,
21
(06)
: 2415
-
2425
[69]
ZEHNER DM, 1980, SURF SCI, V92, pL67, DOI 10.1016/0039-6028(80)90205-8
[70]
PREPARATION OF ATOMICALLY CLEAN SILICON SURFACES BY PULSED LASER IRRADIATION
ZEHNER, DM
论文数:
0
引用数:
0
h-index:
0
ZEHNER, DM
WHITE, CW
论文数:
0
引用数:
0
h-index:
0
WHITE, CW
OWNBY, GW
论文数:
0
引用数:
0
h-index:
0
OWNBY, GW
[J].
APPLIED PHYSICS LETTERS,
1980,
36
(01)
: 56
-
59
←
1
2
3
4
5
6
7
8
→
共 73 条
[61]
CALCULATION OF THE DYNAMICS OF SURFACE MELTING DURING LASER ANNEALING
SURKO, CM
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
SURKO, CM
SIMONS, AL
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
SIMONS, AL
AUSTON, DH
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
AUSTON, DH
GOLOVCHENKO, JA
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
GOLOVCHENKO, JA
SLUSHER, RE
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
SLUSHER, RE
VENKATESAN, TNC
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
BELL TEL LABS INC,CRAWFORD HILL LAB,HOLMDEL,NJ 07733
VENKATESAN, TNC
[J].
APPLIED PHYSICS LETTERS,
1979,
34
(10)
: 635
-
637
[62]
REASONS TO BELIEVE PULSED LASER ANNEALING OF SI DOES NOT INVOLVE SIMPLE THERMAL MELTING
VANVECHTEN, JA
论文数:
0
引用数:
0
h-index:
0
机构:
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
VANVECHTEN, JA
TSU, R
论文数:
0
引用数:
0
h-index:
0
机构:
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
TSU, R
SARIS, FW
论文数:
0
引用数:
0
h-index:
0
机构:
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
SARIS, FW
HOONHOUT, D
论文数:
0
引用数:
0
h-index:
0
机构:
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
FOM,INST ATOOM & MOLECUULFYS,AMSTERDAM,NETHERLANDS
HOONHOUT, D
[J].
PHYSICS LETTERS A,
1979,
74
(06)
: 417
-
421
[63]
LASER ANNEALING SI COVERED WITH A METAL-FILM - TEST FOR GROWTH FROM THE MELT
VANVECHTEN, JA
论文数:
0
引用数:
0
h-index:
0
VANVECHTEN, JA
[J].
PHYSICAL REVIEW LETTERS,
1981,
47
(04)
: 283
-
283
[64]
VANVECHTEN JA, 1980, J PHYS-PARIS, V41, P15
[65]
THEORETICAL-ANALYSIS OF THERMAL AND MASS-TRANSPORT IN ION-IMPLANTED LASER-ANNEALED SILICON
WANG, JC
论文数:
0
引用数:
0
h-index:
0
WANG, JC
WOOD, RF
论文数:
0
引用数:
0
h-index:
0
WOOD, RF
PRONKO, PP
论文数:
0
引用数:
0
h-index:
0
PRONKO, PP
[J].
APPLIED PHYSICS LETTERS,
1978,
33
(05)
: 455
-
458
[66]
VIDICON-CAMERA PARALLEL-DETECTION SYSTEM FOR ANGLE-RESOLVED ELECTRON-SPECTROSCOPY
WEEKS, SP
论文数:
0
引用数:
0
h-index:
0
机构:
Bell Laboratories, Murray Hill
WEEKS, SP
ROWE, JE
论文数:
0
引用数:
0
h-index:
0
机构:
Bell Laboratories, Murray Hill
ROWE, JE
CHRISTMAN, SB
论文数:
0
引用数:
0
h-index:
0
机构:
Bell Laboratories, Murray Hill
CHRISTMAN, SB
CHABAN, EE
论文数:
0
引用数:
0
h-index:
0
机构:
Bell Laboratories, Murray Hill
CHABAN, EE
[J].
REVIEW OF SCIENTIFIC INSTRUMENTS,
1979,
50
(10)
: 1249
-
1255
[67]
SUPERSATURATED SUBSTITUTIONAL ALLOYS FORMED BY ION-IMPLANTATION AND PULSED LASER ANNEALING OF GROUP-III AND GROUP-V DOPANTS IN SILICON
WHITE, CW
论文数:
0
引用数:
0
h-index:
0
WHITE, CW
WILSON, SR
论文数:
0
引用数:
0
h-index:
0
WILSON, SR
APPLETON, BR
论文数:
0
引用数:
0
h-index:
0
APPLETON, BR
YOUNG, FW
论文数:
0
引用数:
0
h-index:
0
YOUNG, FW
[J].
JOURNAL OF APPLIED PHYSICS,
1980,
51
(01)
: 738
-
749
[68]
DYNAMICS OF DENSE LASER-INDUCED PLASMAS
YOFFA, EJ
论文数:
0
引用数:
0
h-index:
0
YOFFA, EJ
[J].
PHYSICAL REVIEW B,
1980,
21
(06)
: 2415
-
2425
[69]
ZEHNER DM, 1980, SURF SCI, V92, pL67, DOI 10.1016/0039-6028(80)90205-8
[70]
PREPARATION OF ATOMICALLY CLEAN SILICON SURFACES BY PULSED LASER IRRADIATION
ZEHNER, DM
论文数:
0
引用数:
0
h-index:
0
ZEHNER, DM
WHITE, CW
论文数:
0
引用数:
0
h-index:
0
WHITE, CW
OWNBY, GW
论文数:
0
引用数:
0
h-index:
0
OWNBY, GW
[J].
APPLIED PHYSICS LETTERS,
1980,
36
(01)
: 56
-
59
←
1
2
3
4
5
6
7
8
→