PRODUCTION OF SILICON-OXIDES FROM THE GLOW-DISCHARGE DECOMPOSITION OF SILANE AND NO-2

被引：7

作者：

EAGLE, DJ

MILNE, WI

机构：

[1] Univ of Cambridge, Cambridge, Engl, Univ of Cambridge, Cambridge, Engl

来源：

THIN SOLID FILMS | 1987年 / 147卷 / 03期

关键词：

This work was partly funded by the Science and Engineering Research Council through the Alvey programme. Acknowledgment is also due to P. E. Barden for help with the ellipsometry program used; and also to GEC Hirst Research Centre for providing gases and items of equipment;

D O I：

10.1016/0040-6090(87)90021-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：259 / 266

页数：8

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