A MULTIPOINT CORRELATION METHOD FOR BULK TRAP AND INTERFACE STATE MEASUREMENTS IN MOS STRUCTURES FROM CAPACITANCE, VOLTAGE, AND CURRENT TRANSIENTS

被引：5

作者：

DMOWSKI, K

BETHGE, K

MAURER, C

机构：

[1] Institut für Kernphysik, Universität Frankfurt, D 6000 Frankfurt am Main 90

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1991年 / 62卷 / 08期

关键词：

D O I：

10.1063/1.1142399

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A multipoint correlation method is described to improve the analysis of the energy resolution of bulk traps and interface states in metal-oxide-semiconductor structures measured by constant voltage, constant capacitance, and current deep-level transient spectroscopy. The results obtained for the proposed method are given with those obtained for both Lang's method and the method utilizing an exponential weighting function.

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页码：1955 / 1963

页数：9

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