ELECTRICAL CHARACTERISTICS OF POLYCRYSTALLINE SILICON-SILICON NITRIDE SILICON DIOXIDE SILICON STRUCTURES

被引：4

作者：

MAEKAWA, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1972年 / 11卷 / 09期

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D O I：

10.1143/JJAP.11.1251

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：1251 / &

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