ELLIPSOMETRY OF THIN FILM SYSTEMS

被引:94
作者
Ohlidal, Ivan [1 ]
Franta, Daniel [1 ]
机构
[1] Masaryk Univ, Fac Sci, Dept Phys Elect, CS-61137 Brno, Czech Republic
来源
PROGRESS IN OPTICS, VOL 41 | 2000年 / 41卷
关键词
D O I
10.1016/S0079-6638(00)80018-9
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:181 / 282
页数:102
相关论文
共 157 条
[1]  
ABELES F, 1950, ANN PHYSIQUE, V12, P596
[2]   IMPROVEMENTS OF PHASE-MODULATED ELLIPSOMETRY [J].
ACHER, O ;
BIGAN, E ;
DREVILLON, B .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (01) :65-77
[3]   OPTICAL-CONSTANTS OF (GAAS)2-20-(ALAS)2-20 SUPERLATTICES [J].
ANMA, H ;
YAMAGUCHI, T ;
OKUMURA, H ;
YOSHIDA, S .
PHYSICA A, 1989, 157 (01) :407-410
[4]  
[Anonymous], 1995, PROGR OPTICS
[6]  
Aspnes D. E., 1973, Optics Communications, V8, P222, DOI 10.1016/0030-4018(73)90132-6
[7]   DIELECTRIC FUNCTION AND SURFACE MICROROUGHNESS MEASUREMENTS OF INSB BY SPECTROSCOPIC ELLIPSOMETRY [J].
ASPNES, DE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (05) :1057-1060
[8]   OPTIMIZING PRECISION OF ROTATING-ANALYZER ELLIPSOMETERS [J].
ASPNES, DE .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (05) :639-646
[9]   PRECISION BOUNDS TO ELLIPSOMETER SYSTEMS [J].
ASPNES, DE .
APPLIED OPTICS, 1975, 14 (05) :1131-1136
[10]   NEW DEVELOPMENTS IN SPECTROELLIPSOMETRY - THE CHALLENGE OF SURFACES [J].
ASPNES, DE .
THIN SOLID FILMS, 1993, 233 (1-2) :1-8