High conductance bottom-contact pentacene thin-film transistors with gold-nickel adhesion layers

被引:42
作者
Kitamura, Masatoshi [1 ]
Kuzumoto, Yasutaka [1 ,2 ]
Kang, Woogun [3 ]
Aomori, Shigeru [1 ,2 ]
Arakawa, Yasuhiko [1 ,3 ]
机构
[1] Univ Tokyo, Inst Nano Quantum Informat Elect NanoQuine, Meguro Ku, Tokyo 1538505, Japan
[2] Sharp Co Ltd, Corp Res & Dev Grp, Nara 6328567, Japan
[3] Univ Tokyo, IIS, Meguro Ku, Tokyo 1538505, Japan
关键词
adhesion; contact resistance; electrodes; gold alloys; nickel alloys; thin film transistors; RESISTANCE; ELECTRODES; REDUCTION; CHANNEL;
D O I
10.1063/1.3465735
中图分类号
O59 [应用物理学];
学科分类号
摘要
Bottom-contact pentacene thin-film transistors (TFTs) with different electrode types have been fabricated to investigate influence of the adhesion layers and surface modification on the transistor characteristics. Gold-nickel alloy or Ti was used for the adhesion layer; the drain/source electrodes were modified with pentafluorobenzenethiol (PFBT) or nonmodified. The TFTs with AuNi layers and PFBT-modified electrodes exhibit channel-length independent saturation mobility. The electrode-type TFT with a channel length of 2.2 mu m has a saturation mobility of 0.73 cm(2)/V s and a transconductance of 229 mu S/mm. The high performance is attributed to the low contact resistance of 408 cm. (C) 2010 American Institute of Physics. [doi:10.1063/1.3465735]
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页数:3
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