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Assessment of an ionized CO2 gas cluster accelerator

被引：20
作者：
Song, JH
Kwon, SN
Choi, DK
Choi, WK
机构：
[1] Korea Inst Sci & Technol, Thin Film Technol Res Ctr, Seoul 136791, South Korea
[2] Yonsei Univ, Dept Phys, Seoul 170749, South Korea
[3] Hanyang Univ, Dept Inorgan Mat Engn, Seongdong Ku, Seoul 133791, South Korea
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2001年 / 179卷 / 04期
关键词：
gas cluster ion beam; retarding field analyzer; time-of-flight mass spectrometry; hillocks;
D O I：
10.1016/S0168-583X(01)00686-3
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A 150 kV gas cluster ion accelerator was constructed. Using a retarding field analyzer and time-of-flight (TOF) mass spectrometry, the gas cluster source was characterized. To form cluster beams, the CO2 gas was expanded through a quartz Laval nozzle at a pressure of 1-5 bar. It is confirmed that clusters formed with a mean size of more than 500 molecules. The effect of source temperature on cluster size was also examined. When CO2 cluster ions were irradiated onto a highly oriented pyrolytic graphite (HOPG) at the acceleration voltage of 40 kV, isolated impact of the cluster ions was found to generate hillocks about 0.8 nm in height and 20 nm in diameter. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：568 / 574
页数：7
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