Gate metallurgy effects in InAs/AlSb HFETs: Preliminary results and demonstration of surface Fermi level shifts

被引:1
作者
Bolognesi, CR
Dvorak, MW
Chow, DH
机构
[1] Simon Fraser Univ, Dept Phys, Compound Semicond Device Lab, Burnaby, BC V5A 1S6, Canada
[2] Hughes Res Labs, Malibu, CA 90265 USA
[3] Simon Fraser Univ, Sch Engn Sci, Burnaby, BC V5A 1S6, Canada
关键词
kink effect; surface Fermi level pinning; threshold voltage;
D O I
10.1007/s11664-998-0136-x
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The effect of gate metallurgy on depletion-mode InAs/AlSb heterostructure field-effect transistors (HFETs) is studied for the first time by carefully comparing the characteristics of Al- and Ti/Au-gate transistors. HFETs fabricated simultaneously from the same molecular beam epitaxial layers and processed identically, but differing only in the metal used for the gate electrode, feature very different gate and drain I-V characteristics. The metal dependence indicates that the Fermi level is not completely pinned at the surface of InAs/AlSb quantum wells. We also show that the gate metal modifies the charge control properties of InAs/AlSb HFETs: Al-gate HFETs exhibit an enhanced kink effect accompanied by a marked transconductance compression at zero gate bias, whereas the Ti/Au-gate devices exhibit nearly kink-free drain characteristics. The gate metal dependence is shown to be a consequence of the increased channel equilibrium electron concentration accompanying the Al-metallization.
引用
收藏
页码:L54 / L57
页数:4
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