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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1991, 9 (03)
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EFFECT OF ANODE BIAS ON THE INDEX OF REFRACTION OF AL2O3 THIN-FILMS DEPOSITED BY DC S-GUN MAGNETRON REACTIVE SPUTTERING
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1994, 12 (02)
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REACTIVE DEPOSITION OF LOW-LOSS AL2O3 OPTICAL-WAVEGUIDES BY MODIFIED DC PLANAR MAGNETRON SPUTTERING
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1984, 2 (03)
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GROWTH-TEMPERATURE DEPENDENCE OF THE QUALITY OF AL2O3 PREPARED BY SEQUENTIAL SURFACE CHEMICAL-REACTION OF TRIMETHYLALUMINUM AND H2O2
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JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS,
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