CALCULATED AND MEASURED INFRARED REFLECTIVITY OF DIFFUSED IMPLANTED P-TYPE SILICON LAYERS

被引:10
作者
BARTA, E [1 ]
LUX, G [1 ]
机构
[1] TUNGSRAM CO,H-1340 BUDAPEST,HUNGARY
关键词
D O I
10.1088/0022-3727/16/8/021
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:1543 / 1553
页数:11
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