INVESTIGATIONS OF THE ALTERED SURFACE FORMED DURING THE ION-ASSISTED ETCHING OF TITANIUM

被引：10

作者：

OBRIEN, WL

RHODIN, TN

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 05期

关键词：

D O I：

10.1116/1.584469

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1244 / 1251

页数：8

共 19 条

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