ELECTROMIGRATION MECHANISMS IN ALUMINUM LINES

被引：46

作者：

SCHREIBER, HU

机构：

来源：

SOLID-STATE ELECTRONICS | 1985年 / 28卷 / 11期

关键词：

D O I：

10.1016/0038-1101(85)90196-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：1153 / &

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[7] DIFFUSION OF AL-26 AND MN-54 IN ALUMINUM
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[8] ELECTROMIGRATION THRESHOLD IN ALUMINUM FILMS
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[J]. SOLID-STATE ELECTRONICS, 1985, 28 (06) : 617 - 626
[9] ELECTROMIGRATION MEASURING TECHNIQUES FOR GRAIN-BOUNDARY DIFFUSION ACTIVATION-ENERGY IN ALUMINUM
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[J]. SOLID-STATE ELECTRONICS, 1981, 24 (12) : 1135 - 1146
[10] ACTIVATION-ENERGIES FOR THE DIFFERENT ELECTROMIGRATION MECHANISMS IN ALUMINUM
SCHREIBER, HU
[J]. SOLID-STATE ELECTRONICS, 1981, 24 (06) : 583 - &