ASSESSMENT OF THE EXTENT OF ATOMIC MIXING FROM SPUTTERING EXPERIMENTS

被引：58

作者：

WITTMAACK, K ^{[1
]}

机构：

[1] CITY LONDON POLYTECH,DEPT PHYS,LONDON EC3N 2EY,ENGLAND

来源：

关键词：

D O I：

10.1063/1.331356

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4817 / 4820

页数：4

共 18 条

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