DIFFUSION PHENOMENA AND DEFECT GENERATION IN RAPIDLY ANNEALED GAAS

被引：30

作者：

PEARTON, SJ

CUMMINGS, KD

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 04期

关键词：

D O I：

10.1063/1.336083

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1500 / 1504

页数：5

共 18 条

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