FORMATION OF TITANIUM SILICIDES BY FAST RADIATIVE PROCESSING

被引：13

作者：

WEI, CS ^{[1
]}

VANDERSPIEGEL, J ^{[1
]}

SANTIAGO, JJ ^{[1
]}

SEIBERLING, LE ^{[1
]}

机构：

[1] UNIV PENN,DEPT PHYS,PHILADELPHIA,PA 19104

来源：

APPLIED PHYSICS LETTERS | 1984年 / 45卷 / 05期

关键词：

D O I：

10.1063/1.95302

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：527 / 528

页数：2

共 15 条

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[9]

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