COMPOSITE OXIDE-FILMS FORMED BY DC PLASMA ANODIZATION OF AL/GAAS

被引：5

作者：

PU, NF ^{[1
]}

ROBINSON, GY ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT ELECT ENGN,MINNEAPOLIS,MN 55455

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 01期

关键词：

D O I：

10.1063/1.329903

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：416 / 420

页数：5

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