AUTOMATIC CORRECTION FOR EFFECTS OF AUGER LINE-SHAPE CHANGES ON DEPTH PROFILES

被引：15

作者：

GRANT, JT

WOLFE, RG

HOOKER, MP

SPRINGER, RW

HAAS, TW

机构：

[1] UNIVERSAL ENERGY SYST INC,DAYTON,OH 45432

[2] USAF,MAT LAB,WRIGHT PATTERSON AFB,OH 45433

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期

关键词：

D O I：

10.1116/1.569129

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：232 / 235

页数：4

共 24 条

[1] EFFECT OF MODULATION AMPLITUDE ON ELECTRON-EXCITED AUGER DATA FROM TITANIUM
GRANT, JT
HAAS, TW
HOUSTON, JE
[J]. SURFACE SCIENCE, 1974, 42 (01) : 1 - 11
[2] QUANTITATIVE COMPARISON OF TI AND TIO SURFACES USING AUGER-ELECTRON AND SOFT-X-RAY APPEARANCE POTENTIAL SPECTROSCOPIES
GRANT, JT
HAAS, TW
HOUSTON, JE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 227 - 230
[3] AUGER CURRENT MEASUREMENTS FOR QUANTITATIVE AUGER-ELECTRON SPECTROSCOPY OF SOLIDS
GRANT, JT
HOOKER, MP
HAAS, TW
[J]. JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1976, 55 (02) : 370 - 376
[4] APPLICATION OF TAILORED MODULATION TECHNIQUES TO DEPTH PROFILING WITH AUGER-ELECTRON SPECTROSCOPY
GRANT, JT
HOOKER, MP
SPRINGER, RW
HAAS, TW
[J]. SURFACE SCIENCE, 1976, 60 (01) : 1 - 12
[5] USE OF ANALOG INTEGRATION IN DYNAMIC BACKGROUND SUBTRACTION FOR QUANTITATIVE AUGER-ELECTRON SPECTROSCOPY - STUDY OF CO ON MO(110)
GRANT, JT
HOOKER, MP
HAAS, TW
[J]. SURFACE SCIENCE, 1974, 46 (02) : 672 - 675
[6] CORRECTIONS OF AUGER-ELECTRON SIGNAL STRENGTHS FOR MODULATION AMPLITUDE DISTORTION IN A 4-GRID RETARDING POTENTIAL-ENERGY ANALYZER
GRANT, JT
HAAS, TW
[J]. SURFACE SCIENCE, 1974, 44 (02) : 617 - 623
[7] QUANTITATIVE AUGER ANALYSIS USING INTEGRATION TECHNIQUES
GRANT, JT
HAAS, TW
HOUSTON, JE
[J]. PHYSICS LETTERS A, 1973, A 45 (04) : 309 - 310
[8] CHEMICAL EFFECTS IN AUGER-ELECTRON SPECTROSCOPY
HAAS, TW
GRANT, JT
DOOLEY, GJ
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (04) : 1853 - &
[9] CHEMICAL-SHIFTS IN AUGER-ELECTRON SPECTRA FROM SILICON IN SILICON-NITRIDE
HOLLOWAY, PH
[J]. SURFACE SCIENCE, 1976, 54 (02) : 506 - 508
[10] HOUSTON JE, 1974, REV SCI INSTRUM, V45, P897, DOI 10.1063/1.1686763

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