PROPERTIES OF MAGNETRON-SPUTTERED SILICON-NITRIDE FILMS

被引：50

作者：

SERIKAWA, T

OKAMOTO, A

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 12期

关键词：

D O I：

10.1149/1.2115444

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2928 / 2933

页数：6

共 25 条

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