TEMPERATURE-DEPENDENCE OF PROFILE TAILING AND SEGREGATION IN SIMS ANALYSIS OF ARSENIC IN SI AND SIO2 WITH OXYGEN PRIMARY IONS

被引：16

作者：

SCHULTE, F

MAIER, M

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 15卷 / 1-6期

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D O I：

10.1016/0168-583X(86)90284-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

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页码：198 / 200

页数：3

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