THE OXIDATION OF SILICON BY DRY OXYGEN - CAN WE DISTINGUISH BETWEEN MODELS

被引：42

作者：

BLANC, J ^{[1
]}

机构：

[1] RCA LABS,PRINCETON,NJ 08543

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1987年 / 55卷 / 06期

关键词：

D O I：

10.1080/13642818708218374

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：685 / 710

页数：26

共 30 条

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