EFFECT OF ION-IMPLANTATION ON OXIDE CHARGE STORAGE IN MOS DEVICES

被引：8

作者：

WANG, ST ^{[1
]}

ROYCE, BSH ^{[1
]}

RUSSELL, TJ ^{[1
]}

机构：

[1] PRINCETON UNIV,MAT LAB,PRINCETON,NJ 08540

来源：

IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 1975年 / 22卷 / 06期

关键词：

D O I：

10.1109/TNS.1975.4328099

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2168 / 2173

页数：6

共 14 条

[1] RADIATION HARDENING OF P-MOS DEVICES BY OPTIMIZATION OF THERMAL S102 GATE INSULATOR [J].

AUBUCHON, KG .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1971, NS18 (06) :117-+

[2] GAMMA AND VACUUM ULTRAVIOLET IRRADIATIONS OF ION-IMPLANTED SIO2 FOR MOS DIELECTRICS [J].

EMMS, CG ;

HOLMESSIEDLE, AG ;

GROOMBRIDGE, I ;

BOSNELL, JR .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1974, NS21 (06) :159-166

[3] EFFECTS OF ELECTRON AND HOLE TRAPPING ON RADIATION HARDNESS OF AL2O3 MIS DEVICES [J].

HARARI, E ;

ROYCE, BSH .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1973, NS20 (06) :280-287

[4] LOW-TEMPERATURE IRRADIATION EFFECTS IN SIO2-INSULATED MIS DEVICES [J].

HARARI, E ;

WANG, S ;

ROYCE, BSH .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (03) :1310-1317

[5] OXIDE CHARGE TRAPPING INDUCED BY ION-IMPLANTATION IN SIO2 [J].

HARARI, E ;

ROYCE, BSH .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1973, NS20 (06) :288-292

[6] DEPENDENCE OF MOS DEVICE RADIATION-SENSITIVITY ON OXIDE IMPURITIES [J].

HUGHES, HL ;

BAXTER, RD ;

PHILLIPS, B .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1972, NS19 (06) :256-263

[7] ELECTRON TRAPPING IN ALUMINUM-IMPLANTED SILICON DIOXIDE FILMS ON SILICON [J].

JOHNSON, NM ;

JOHNSON, WC ;

LAMPERT, MA .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (03) :1216-1222

[8] EFFECTS OF IONIZING-RADIATION ON CHARGE-COUPLED DEVICE STRUCTURES [J].

KILLIANY, JM ;

BAKER, WD ;

SAKS, NS ;

BARBE, DF .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1974, NS21 (06) :193-200

[9] RADIATION EFFECTS IN MODIFIED OXIDE INSULATORS IN MOS STRUCTURES [J].

PERKINS, CW ;

AUBUCHON, KG ;

DILL, HG .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1968, NS15 (06) :176-+

[10] VACUUM ULTRAVIOLET RADIATION EFFECTS IN SIO2 [J].

POWELL, RJ ;

DERBENWICK, GF .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1971, NS18 (06) :99-+

← 1 2 →