ORIENTATION DEPENDENCE OF LATERAL SOLID-PHASE-EPITAXIAL GROWTH IN AMORPHOUS SI FILMS

被引：26

作者：

YAMAMOTO, H ^{[1
]}

ISHIWARA, H ^{[1
]}

FURUKAWA, S ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,DEPT APPL ELECTR,MIDORI KU,YOKOHAMA,KANAGAWA 227,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 05期

关键词：

D O I：

10.1143/JJAP.25.667

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：667 / 672

页数：6

共 9 条

[1] LATERAL SOLID-PHASE EPITAXY OF AMORPHOUS SI FILMS ON SI SUBSTRATES WITH SIO2 PATTERNS
ISHIWARA, H
YAMAMOTO, H
FURUKAWA, S
TAMURA, M
TOKUYAMA, T
[J]. APPLIED PHYSICS LETTERS, 1983, 43 (11) : 1028 - 1030
[2] BORON DOPING EFFECTS IN LATERAL SOLID-PHASE EPITAXY OF AMORPHOUS SI FILMS
ISHIWARA, H
TAMBA, A
YAMAMOTO, H
FURUKAWA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (07): : L513 - L515
[3] LATERAL SOLID-PHASE EPITAXY OF VACUUM-DEPOSITED AMORPHOUS SI FILM OVER RECESSED SIO2 PATTERNS
KUNII, Y
TABE, M
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1985, 24 (05): : L352 - L354
[4] SOLID-PHASE LATERAL EPITAXY OF CHEMICAL-VAPOR-DEPOSITED AMORPHOUS-SILICON BY FURNACE ANNEALING
KUNII, Y
TABE, M
KAJIYAMA, K
[J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) : 2847 - 2849
[5] AMORPHOUS-SI CRYSTALLINE-SI FACET FORMATION DURING SI SOLID-PHASE EPITAXY NEAR SI/SIO2 BOUNDARY
KUNII, Y
TABE, M
KAJIYAMA, K
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (02) : 279 - 285
[6] ROTH JA, 1984, P S ENERGY BEAM SOLI, P431
[7] CHARACTERIZATION OF SOLID-PHASE EPITAXIALLY-GROWN SILICON FILMS ON SIO2
TAMURA, M
TOKUYAMA, T
YAMAMOTO, H
ISHIWARA, H
FURUKAWA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (10): : 1294 - 1299
[8] ON THE MECHANISMS OF LATERAL SOLID-PHASE EPITAXIAL-GROWTH OF AMORPHOUS SI FILMS EVAPORATED ON SIO2 PATTERNS
YAMAMOTO, H
ISHIWARA, H
FURUKAWA, S
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (04): : 411 - 415
[9] ENHANCEMENT OF LATERAL SOLID-PHASE EPITAXIAL-GROWTH IN EVAPORATED AMORPHOUS SI FILMS BY PHOSPHORUS IMPLANTATION
YAMAMOTO, H
ISHIWARA, H
FURUKAWA, S
[J]. APPLIED PHYSICS LETTERS, 1985, 46 (03) : 268 - 270

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