THEORY FOR THE PLASMA ANODIZATION OF SILICON UNDER CONSTANT VOLTAGE AND CONSTANT CURRENT CONDITIONS

被引：31

作者：

TAYLOR, S

ECCLESTON, W

BARLOW, KJ

机构：

来源：

关键词：

D O I：

10.1063/1.342076

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6515 / 6522

页数：8

共 23 条

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