TRANSPORT NUMBER MEASUREMENTS DURING PLASMA ANODIZATION OF SI, GAAS, AND ZRSI2

被引：46

作者：

PERRIERE, J ^{[1
]}

SIEJKA, J ^{[1
]}

REMILI, N ^{[1
]}

LAURENT, A ^{[1
]}

STRABONI, A ^{[1
]}

VUILLERMOZ, B ^{[1
]}

机构：

[1] CTR NATL ETUD TELECOMMUN,F-38240 MEYLAN,FRANCE

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 08期

关键词：

D O I：

10.1063/1.336984

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2752 / 2759

页数：8

共 25 条

[1] 7ICROANALYSIS BY DIRECT OBSERVATION OF NUCLEAR REACTIONS USING A 2 MEV VAN-DE-GRAAFF [J].

AMSEL, G ;

NADAI, JP ;

DARTEMAR.E ;

DAVID, D ;

GIRARD, E ;

MOULIN, J .

NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04) :481-&

[2] USE OF RUTHERFORD BACKSCATTERING TO STUDY BEHAVIOR OF ION-IMPLANTED ATOMS DURING ANODIC-OXIDATION OF ALUMINUM - AR, KR, XE, K, RB, CS, CL, BR, AND I [J].

BROWN, F ;

MACKINTOSH, WD .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (08) :1096-1102

[3] PLASMA OXIDATION OF ALUMINUM FILM ON GAAS - STUDY BY AUGER-SPECTROSCOPY AND TRANSMISSION ELECTRON-MICROSCOPY [J].

CHANG, RPH ;

CHANG, CC ;

SHENG, TT .

APPLIED PHYSICS LETTERS, 1977, 30 (12) :657-659

[4]

CHANG RPH, 1980, APPL PHYS LETT, V36, P399

[5] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J].

CHU, WK ;

MAYER, JW ;

NICOLET, MA ;

BUCK, TM ;

AMSEL, G ;

EISEN, F .

THIN SOLID FILMS, 1973, 17 (01) :1-41

[6] GENERAL RELATIONSHIP FOR THERMAL OXIDATION OF SILICON [J].

DEAL, BE ;

GROVE, AS .

JOURNAL OF APPLIED PHYSICS, 1965, 36 (12) :3770-&

[7] SIO2 ULTRA THIN-FILM GROWTH-KINETICS AS INVESTIGATED BY SURFACE TECHNIQUES [J].

DERRIEN, J ;

COMMANDRE, M .

SURFACE SCIENCE, 1982, 118 (1-2) :32-46

[8] CATION AND ANION TRANSPORT NUMBERS IN ANODIC GAAS OXIDES [J].

FISCHER, CW ;

CANADAY, JD .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (08) :1740-1744

[9] REVIEW OF OXIDATION PROCESSES IN PLASMAS [J].

FRIEDEL, P ;

GOURRIER, S .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1983, 44 (05) :353-364

[10] NON-SIMULTANEOUS PLACE EXCHANGE - MICROSCOPIC HIGH-FIELD TRANSPORT MECHANISM IN SOLIDS [J].

FROMHOLD, AT .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (02) :411-425

← 1 2 3 →