SIMULATIONS OF TWO-DIMENSIONAL RECIRCULATING FLOW EFFECTS IN HORIZONTAL MOVPE

被引:26
作者
FIELD, RJ
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D O I
10.1016/0022-0248(89)90578-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:739 / 760
页数:22
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