PATTERNING CHARACTERISTICS OF ITO THIN-FILMS

被引:36
作者
INOUE, M
MATSUOKA, T
FUJITA, Y
ABE, A
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 02期
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D O I
10.1143/JJAP.28.274
中图分类号
O59 [应用物理学];
学科分类号
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页码:274 / 278
页数:5
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