ACTIVATION-ENERGY FOR THE PARABOLIC RATE-CONSTANT DURING SEQUENTIAL SI OXIDATION

被引：15

作者：

HAN, CJ

HELMS, CR

机构：

[1] Stanford Univ, Stanford Electronics, Lab, Stanford, CA, USA, Stanford Univ, Stanford Electronics Lab, Stanford, CA, USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 02期

关键词：

D O I：

10.1149/1.2113876

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：516 / 517

页数：2

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