INFLUENCE OF SUBSTRATE-TEMPERATURE AND INAS MOLE FRACTION ON THE INCORPORATION OF INDIUM DURING MOLECULAR-BEAM EPITAXIAL-GROWTH OF INGAAS SINGLE QUANTUM WELLS ON GAAS

被引:44
作者
RADULESCU, DC [1 ]
SCHAFF, WJ [1 ]
EASTMAN, LF [1 ]
BALLINGALL, JM [1 ]
RAMSEYER, GO [1 ]
HERSEE, SD [1 ]
机构
[1] GE CO,ELECTR LAB,SYRACUSE,NY 13221
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 01期
关键词
D O I
10.1116/1.584432
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:111 / 115
页数:5
相关论文
共 26 条
  • [1] A STUDY OF STRAIN-RELATED EFFECTS IN THE MOLECULAR-BEAM EPITAXY GROWTH OF INXGA1-XAS ON GAAS USING REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION
    BERGER, PR
    CHANG, K
    BHATTACHARYA, PK
    SINGH, J
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (04): : 1162 - 1166
  • [2] 0.1-MU-M GATE-LENGTH PSEUDOMORPHIC HEMTS
    CHAO, PC
    TIBERIO, RC
    DUH, KHG
    SMITH, PM
    BALLINGALL, JM
    LESTER, LF
    LEE, BR
    JABRA, A
    GIFFORD, GG
    [J]. IEEE ELECTRON DEVICE LETTERS, 1987, 8 (10) : 489 - 491
  • [3] BIAS-DEPENDENT MICROWAVE CHARACTERISTICS OF ATOMIC PLANAR-DOPED ALGAAS/INGAAS/GAAS DOUBLE HETEROJUNCTION MODFETS
    CHEN, YK
    WANG, GW
    RADULESCU, DC
    LEPORE, AN
    TASKER, PJ
    EASTMAN, LF
    STRID, E
    [J]. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1987, 35 (12) : 1456 - 1460
  • [4] TEMPERATURE-DEPENDENCE OF MOLECULAR-BEAM EPITAXIAL-GROWTH RATES FOR INXGA1-XAS AND INXAL1-XAS
    CHIKA, S
    KATO, H
    NAKAYAMA, M
    SANO, N
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1986, 25 (09): : 1441 - 1442
  • [5] MILLIMETER-WAVE LOW-NOISE HEMTS
    DUH, KHG
    CHAO, PC
    SMITH, PM
    LESTER, LF
    LEE, BR
    HWANG, JCM
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1986, 33 (11) : 1838 - 1838
  • [6] EASTMAN LF, 1986, IEEE IEDM TECH DIG, V86, P456
  • [7] THE EFFECT OF LATTICE MISMATCH ON THE DYNAMIC MICROSTRUCTURE OF III-V COMPOUND SURFACES
    EBNER, JT
    ARTHUR, JR
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 2007 - 2010
  • [8] GROWTH BY MOLECULAR-BEAM EPITAXY AND CHARACTERIZATION OF INAS/GAAS STRAINED-LAYER SUPERLATTICES
    GOLDSTEIN, L
    GLAS, F
    MARZIN, JY
    CHARASSE, MN
    LEROUX, G
    [J]. APPLIED PHYSICS LETTERS, 1985, 47 (10) : 1099 - 1101
  • [9] THERMODYNAMIC ASPECTS OF MOLECULAR-BEAM EPITAXY - HIGH-TEMPERATURE GROWTH IN THE GAAS/GA1-XALXAS SYSTEM
    HECKINGBOTTOM, R
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (02): : 572 - 575
  • [10] HENDERSON T, 1987, IEEE IEDM, V87, P418