CHARACTERIZATION OF RF SPUTTER-DEPOSITED TI-W SCHOTTKY-BARRIER DIODES IN BORON-DOPED SILICON

被引:13
作者
PAZ, O
AURET, FD
WHITE, JF
机构
关键词
D O I
10.1149/1.2115944
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:1712 / 1715
页数:4
相关论文
共 17 条
[1]   TRANSIENT CAPACITANCE STUDY OF DEFECTS INTRODUCED BY ELECTRON-BEAM DEPOSITION OF METALS ON P-TYPE SILICON [J].
AURET, FD ;
MOONEY, PM .
JOURNAL OF APPLIED PHYSICS, 1984, 55 (04) :984-987
[2]  
AURET FD, 1984, J APPL PHYS, V55, P1581, DOI 10.1063/1.333418
[3]   DETERMINATION OF HAFNIUM-P-TYPE SILICON SCHOTTKY-BARRIER HEIGHT [J].
BEGUWALA, M ;
CROWELL, CR .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (06) :2792-2794
[4]   CAPACITANCE TRANSIENT SPECTROSCOPY OF TRACE CONTAMINATION IN SILICON [J].
BENTON, JL ;
KIMERLING, LC .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (09) :2098-2102
[5]   SUBSTRATE SURFACE DAMAGES BY RF-SPUTTERING [J].
BERG, S ;
ANDERSSON, LP ;
NORSTROM, H ;
GRUSELL, E .
VACUUM, 1977, 27 (03) :189-191
[6]   EFFECT OF ION-BEAM SPUTTER DAMAGE ON SCHOTTKY-BARRIER FORMATION IN SILICON [J].
FONASH, SJ ;
ASHOK, S ;
SINGH, R .
APPLIED PHYSICS LETTERS, 1981, 39 (05) :423-425
[7]   ELECTRICAL DEFECTS IN SILICON INTRODUCED BY SPUTTERING AND SPUTTER-ETCHING [J].
GRUSELL, E ;
BERG, S ;
ANDERSSON, LP .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (07) :1573-1576
[8]   PENETRATION AND ENERGY-LOSS THEORY OF ELECTRONS IN SOLID TARGETS [J].
KANAYA, K ;
OKAYAMA, S .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1972, 5 (01) :43-&
[9]   EPR OF A CARBON-OXYGEN-DIVACANCY COMPLEX IN IRRADIATED SILICON [J].
LEE, YH ;
CORBETT, JW ;
BROWER, KL .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1977, 41 (02) :637-647
[10]   TRANSIENT CAPACITANCE STUDY OF RADIATION-INDUCED DEFECTS IN ALUMINUM-DOPED SILICON [J].
LEE, YH ;
WANG, KL ;
JAWOROWSKI, A ;
MOONEY, PM ;
CHENG, LJ ;
CORBETT, JW .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 57 (02) :697-704