BACKGROUND FORMATION IN SIMS ANALYSIS OF HYDROGEN, CARBON, NITROGEN AND OXYGEN IN SILICON

被引：50

作者：

WITTMAACK, K

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 218卷 / 1-3期

关键词：

D O I：

10.1016/0167-5087(83)91001-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：327 / 332

页数：6

相关论文

共 12 条

[1] OBSERVATION OF GAS-ABSORPTION IN EVAPORATED AMORPHOUS-SILICON FILMS USING SECONDARY ION MASS-SPECTROMETRY
MAGEE, CW
BEAN, JC
FOTI, G
POATE, JM
[J]. THIN SOLID FILMS, 1981, 81 (01) : 1 - 6
[2] SECONDARY ION QUADRUPOLE MASS-SPECTROMETER FOR DEPTH PROFILING-DESIGN AND PERFORMANCE EVALUATION
MAGEE, CW
HARRINGTON, WL
HONIG, RE
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (04) : 477 - 485
[3] HYDROGEN DEPTH PROFILING USING SIMS - PROBLEMS AND THEIR SOLUTIONS
MAGEE, CW
BOTNICK, EM
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (01): : 47 - 52
[4] DEPTH PROFILING OF N-TYPE DOPANTS IN SI AND GAAS USING CS+ BOMBARDMENT NEGATIVE SECONDARY ION MASS-SPECTROMETRY IN ULTRAHIGH-VACUUM
MAGEE, CW
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (04) : 660 - 663
[5] ION-IMPLANTATION AND SPUTTERING IN THE PRESENCE OF REACTIVE GASES - BOMBARDMENT-INDUCED INCORPORATION OF OXYGEN AND RELATED PHENOMENA
WACH, W
WITTMAACK, K
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (05) : 3341 - 3352
[6] IMPACT-ENERGY DEPENDENCE OF ATOMIC MIXING AND SELECTIVE SPUTTERING OF LIGHT IMPURITIES IN CESIUM-BOMBARDED SILICON
WITTMAACK, K
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 191 - 195
[7] IMPROVED SECONDARY-ION EXTRACTION IN A QUADRUPOLE-BASED ION MICRO-PROBE
WITTMAACK, K
DOWSETT, MG
CLEGG, JB
[J]. INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1982, 43 (01): : 31 - 39
[8] RASTER SCANNING DEPTH PROFILING OF LAYER STRUCTURES
WITTMAACK, K
[J]. APPLIED PHYSICS, 1977, 12 (02): : 149 - 156
[9] SECONDARY ION YIELD VARIATIONS DUE TO CESIUM IMPLANTATION IN SILICON
WITTMAACK, K
[J]. SURFACE SCIENCE, 1983, 126 (1-3) : 573 - 580
[10] DESIGN AND PERFORMANCE OF QUADRUPOLE-BASED SIMS INSTRUMENTS - A CRITICAL-REVIEW
WITTMAACK, K
[J]. VACUUM, 1982, 32 (02) : 65 - 89