LIFETIME EVALUATION OF DENUDED ZONE QUALITY AND INTRINSIC GETTERING EFFECT ON HEAVY-METALS

被引：7

作者：

IKUTA, K

OHARA, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1984年 / 23卷 / 08期

关键词：

D O I：

10.1143/JJAP.23.984

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：984 / 990

页数：7

共 17 条

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