EFFECTS OF CORONA-DISCHARGE-INDUCED OXYGEN ION-BEAMS AND ELECTRIC-FIELDS ON SILICON OXIDATION-KINETICS .2. ELECTRIC-FIELD EFFECTS

被引：19

作者：

MODLIN, DN ^{[1
]}

TILLER, WA ^{[1
]}

机构：

[1] STANFORD UNIV, DEPT MAT SCI & ENGN, STANFORD, CA 94305 USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 07期

关键词：

D O I：

10.1149/1.2114184

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1659 / 1663

页数：5

共 34 条

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