THERMAL-OXIDATION OF TRANSITION-METAL SILICIDES

被引：75

作者：

JIANG, H ^{[1
]}

PETERSSON, CS ^{[1
]}

NICOLET, MA ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91125

来源：

THIN SOLID FILMS | 1986年 / 140卷 / 01期

关键词：

D O I：

10.1016/0040-6090(86)90166-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：115 / 129

页数：15

共 59 条

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BAGLIN, JEE ;

DHEURLE, FM ;

PETERSSON, CS .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (04) :1849-1854

[2] ANODIC OXIDE-FILMS ON CRSI2 [J].

BARCZ, AJ ;

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NICOLET, MA .

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[3] SELF-CONFINED METALLIC INTERCONNECTS FOR VERY LARGE-SCALE INTEGRATION [J].

BARTUR, M ;

NICOLET, MA .

APPLIED PHYSICS LETTERS, 1984, 44 (02) :263-264

[4] THERMAL-OXIDATION OF TRANSITION-METAL SILICIDES - THE ROLE OF MASS-TRANSPORT [J].

BARTUR, M .

THIN SOLID FILMS, 1983, 107 (01) :55-65

[5] THERMAL-OXIDATION OF NICKEL DISILICIDE [J].

BARTUR, M ;

NICOLET, MA .

APPLIED PHYSICS LETTERS, 1982, 40 (02) :175-177

[6] THERMAL-OXIDATION OF TRANSITION-METAL SILICIDES ON SI - SUMMARY [J].

BARTUR, M ;

NICOLET, MA .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (02) :371-375

[7] THERMAL-OXIDATION OF COBALT DISILICIDE [J].

BARTUR, M ;

NICOLET, MA .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 29 (02) :69-70

[8] MARKER EXPERIMENTS FOR DIFFUSION IN THE SILICIDE DURING OXIDATION OF PDSI, PD2SI, COSI2, AND NISI2 FILMS ON [SI] [J].

BARTUR, M ;

NICOLET, MA .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (09) :5404-5405

[9] PROPERTIES OF SIO2 GROWN ON TI, CO, NI, PD, AND PT SILICIDES [J].

BARTUR, M ;

NICOLET, MA .

JOURNAL OF ELECTRONIC MATERIALS, 1984, 13 (01) :81-94

[10] THERMODYNAMIC CONSIDERATIONS IN REFRACTORY METAL-SILICON-OXYGEN SYSTEMS [J].

BEYERS, R .

JOURNAL OF APPLIED PHYSICS, 1984, 56 (01) :147-152

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