HYDROGEN DESORPTION-KINETICS FROM MONOHYDRIDE AND DIHYDRIDE SPECIES ON SILICON SURFACES

被引：542

作者：

GUPTA, P

COLVIN, VL

GEORGE, SM

机构：

来源：

PHYSICAL REVIEW B | 1988年 / 37卷 / 14期

关键词：

D O I：

10.1103/PhysRevB.37.8234

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：8234 / 8243

页数：10

共 57 条

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