AN ADVANCED BIPOLAR-TRANSISTOR WITH SELF-ALIGNED ION-IMPLANTED BASE AND W/POLY EMITTER

被引：10

作者：

CHEN, TC

CHUANG, CT

LI, GP

BASVAIAH, S

TANG, DDL

KETCHEN, MB

NING, TH

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,BIPOLAR VLSI DESIGN GRP,YORKTOWN HTS,NY 10598

[2] IBM CORP,THOMAS J WATSON RES CTR,BIPOLAR DEVICES & CIRCUITS GRP,YORKTOWN HTS,NY 10598

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1988年 / 35卷 / 08期

关键词：

D O I：

10.1109/16.2554

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1322 / 1327

页数：6

共 11 条

[1] ON THE PUNCHTHROUGH CHARACTERISTICS OF ADVANCED SELF-ALIGNED BIPOLAR-TRANSISTORS [J].

CHUANG, CT ;

TANG, DDL ;

LI, GP ;

HACKBARTH, E .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (07) :1519-1524

[2]

CHUANG CT, 1987, IEEE ELECTR DEVICE L, V8, P321, DOI 10.1109/EDL.1987.26645

[3] ADVANCED BIPOLAR-TRANSISTOR MODELING - PROCESS AND DEVICE SIMULATION TOOLS FOR TODAYS TECHNOLOGY [J].

KNEPPER, RW ;

GAUR, SP ;

CHANG, FY ;

SRINIVASAN, GR .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1985, 29 (03) :218-228

[4] BIPOLAR-TRANSISTOR WITH SELF-ALIGNED LATERAL PROFILE [J].

LI, GP ;

CHEN, TC ;

CHUANG, CT ;

STORK, JMC ;

TANG, DD ;

KETCHEN, MB ;

WANG, LK .

IEEE ELECTRON DEVICE LETTERS, 1987, 8 (08) :338-340

[5] AN ADVANCED HIGH-PERFORMANCE TRENCH-ISOLATED SELF-ALIGNED BIPOLAR TECHNOLOGY [J].

LI, GP ;

NING, TH ;

CHUANG, CT ;

KETCHEN, MB ;

TANG, DDL ;

MAUER, J .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (11) :2246-2254

[6] METHODOLOGY FOR BIPOLAR PROCESS DIAGNOSIS AND ITS APPLICATION TO ADVANCED SELF-ALIGNED BIPOLAR-TRANSISTORS [J].

LI, GP ;

HACKBARTH, E ;

CHUANG, CT ;

TANG, DDL ;

CHEN, TC .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (08) :1736-1740

[7] SELF-ALIGNED BIPOLAR-TRANSISTORS FOR HIGH-PERFORMANCE AND LOW-POWER-DELAY VLSI [J].

NING, TH ;

ISAAC, RD ;

SOLOMON, PM ;

TANG, DDL ;

YU, HN ;

FETH, GC ;

WIEDMANN, SK .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1981, 28 (09) :1010-1013

[8] HIGH-SPEED POLYSILICON EMITTER-BASE BIPOLAR-TRANSISTOR [J].

PARK, HK ;

BOYER, K ;

CLAWSON, C ;

EIDEN, G ;

TANG, A ;

YAMAGUCHI, T ;

SACHITANO, J .

IEEE ELECTRON DEVICE LETTERS, 1986, 7 (12) :658-660

[9] DESIGN CONSIDERATIONS OF HIGH-PERFORMANCE NARROW-EMITTER BIPOLAR-TRANSISTORS [J].

TANG, DD ;

CHEN, TC ;

CHUANG, CT ;

LI, GP ;

STORK, JMC ;

KETCHEN, MB ;

HACKBARTH, E ;

NING, TH .

IEEE ELECTRON DEVICE LETTERS, 1987, 8 (04) :174-175

[10] SUB-NANOSECOND SELF-ALIGNED I2L-MTL CIRCUITS [J].

TANG, DD ;

NING, TH ;

ISAAC, RD ;

FETH, GC ;

WIEDMANN, SK ;

YU, HN .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (08) :1379-1384

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