SPUTTER TYPE HF ION-SOURCE FOR ION-BEAM DEPOSITION APPARATUS

被引：18

作者：

YAMASHITA, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 05期

关键词：

D O I：

10.1143/JJAP.26.721

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：721 / 727

页数：7

共 24 条

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].

AISENBERG, S ;

CHABOT, R .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) :2953-+

[2] THIN-FILM DEPOSITION USING LOW-ENERGY ION-BEAMS .1. SYSTEM SPECIFICATION AND DESIGN [J].

AMANO, J ;

BRYCE, P ;

LAWSON, RPW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (02) :591-595

[3] PLASMA DIAGNOSTICS OF AN RF-SPUTTERING GLOW DISCHARGE [J].

COBURN, JW ;

KAY, E .

APPLIED PHYSICS LETTERS, 1971, 18 (10) :435-&

[4] ION-BEAM STUDIES .1. RETARDATION OF ION-BEAMS TO VERY LOW ENERGIES IN AN IMPLANTATION ACCELERATOR [J].

FREEMAN, JH ;

TEMPLE, W ;

BEANLAND, D ;

GARD, GA .

NUCLEAR INSTRUMENTS & METHODS, 1976, 135 (01) :1-11

[5] A SPUTTERING ION SOURCE [J].

HILL, KJ ;

NELSON, RS .

NUCLEAR INSTRUMENTS & METHODS, 1965, 38 (DEC) :15-&

[6] MASS-SEPARATED NEGATIVE-ION-BEAM DEPOSITION SYSTEM [J].

ISHIKAWA, J ;

TAKEIRI, Y ;

TAKAGI, T .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1986, 57 (08) :1512-1518

[7] AXIAL MAGNETIC-FIELD EXTRACTION-TYPE MICROWAVE ION-SOURCE WITH A PERMANENT-MAGNET [J].

ISHIKAWA, J ;

TAKEIRI, Y ;

TAKAGI, T .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1984, 55 (04) :449-456

[8]

Ishikawa J., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P349

[9] EFFECT OF ALLOY COMPOSITION IN LIQUID AUSI ION-SOURCE [J].

KOMURO, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1986, 25 (10) :1500-1503

[10] FUNDAMENTALS OF ION PLATING [J].

MATTOX, DM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01) :47-52

← 1 2 3 →