REDUCTION OF EXCESS PHOSPHORUS AND ELIMINATION OF DEFECTS IN PHOSPHORUS EMITTER DIFFUSIONS

被引：9

作者：

MORRIS, BL

KATZ, LE

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 05期

关键词：

D O I：

10.1149/1.2131544

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：762 / 765

页数：4

共 11 条

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