共 34 条
- [21] LASKY JB, 1985, 1985 P IEDM NEW YORK, P684
- [22] OUTDIFFUSION AND DIFFUSION MECHANISM OF OXYGEN IN SILICON [J]. APPLIED PHYSICS LETTERS, 1985, 47 (09) : 1001 - 1003
- [24] DIFFUSIVITY OF OXYGEN IN SILICON DURING STEAM OXIDATION [J]. APPLIED PHYSICS LETTERS, 1982, 40 (04) : 336 - 337
- [25] Ohashi H., 1987, 1987 International Electron Devices Meeting, IEDM. Technical Digeset (Cat. No.87CH2515-5), P678, DOI 10.1109/IEDM.1987.191519
- [26] Schaber H., 1987, 1987 International Electron Devices Meeting, IEDM. Technical Digeset (Cat. No.87CH2515-5), P170, DOI 10.1109/IEDM.1987.191379
- [27] SILICON-TO-SILICON DIRECT BONDING METHOD [J]. JOURNAL OF APPLIED PHYSICS, 1986, 60 (08) : 2987 - 2989
- [28] SHIMBO M, 1986, SPR EL SOC M BOST, V86, P337