MELTING PHENOMENA AND PULSED-LASER ANNEALING IN SEMICONDUCTORS

被引：27

作者：

NARAYAN, J

FLETCHER, J

WHITE, CW

CHRISTIE, WH

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 12期

关键词：

D O I：

10.1063/1.328685

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：7121 / 7128

页数：8

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