INFLUENCE OF NITROGEN HEAT-TREATMENT ON SILICON SURFACES

被引：12

作者：

FUTAGAMI, M

HAMAZAKI, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1978年 / 17卷 / 08期

关键词：

D O I：

10.1143/JJAP.17.1343

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1343 / 1349

页数：7

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