GETTERING MECHANISMS IN SILICON

被引:88
作者
POLIGNANO, ML [1 ]
CEROFOLINI, GF [1 ]
BENDER, H [1 ]
CLAEYS, C [1 ]
机构
[1] INTERUNIV MICROELECTR CTR,B-3030 LEUVEN,BELGIUM
关键词
D O I
10.1063/1.341939
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:869 / 876
页数:8
相关论文
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