EFFECTS ON INP SURFACE TRAP STATES OF INSITU ETCHING AND PHOSPHORUS-NITRIDE DEPOSITION

被引：24

作者：

JEONG, YH

TAKAGI, S

ARAI, F

SUGANO, T

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 06期

关键词：

D O I：

10.1063/1.339501

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2370 / 2375

页数：6

共 32 条

[1] PREPARATION AND ELECTRICAL-PROPERTIES OF INPXOY GATE INSULATORS ON INP [J].

CHANG, HL ;

MEINERS, LG ;

SA, CJ .

APPLIED PHYSICS LETTERS, 1986, 48 (05) :375-377

[2] ELECTRONIC-PROPERTIES OF METAL-INSULATOR-SEMICONDUCTOR DEVICES PREPARED ON THERMALLY TREATED INP IN PHOSPHORUS OVERPRESSURE [J].

CHOUJAA, A ;

CHAVE, J ;

BLANCHET, R ;

VIKTOROVITCH, P .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (06) :2191-2193

[3] SURFACE VACANCIES IN II-VI AND III-V ZINC BLENDE SEMICONDUCTORS [J].

DAW, MS ;

SMITH, DL ;

SWARTS, CA ;

MCGILL, TC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03) :508-512

[4] SURFACE-DEFECTS AND FERMI-LEVEL PINNING IN INP [J].

DOW, JD ;

ALLEN, RE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :659-661

[5]

FRITZSCHE D, 1980, I PHYS C SER, V50, P258

[6] CHEMICAL VAPOR-DEPOSITION OF PHOSPHORUS NITRIDE AND RELATED-COMPOUNDS [J].

FURUKAWA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (08) :1157-1158

[7] THE GROWTH OF EPITAXIAL INP BY THE CHLORIDE PROCESS IN NITROGEN AND IN THE PRESENCE OF PHOSPHINE [J].

GILES, PL ;

DAVIES, P ;

HASDELL, NB .

JOURNAL OF CRYSTAL GROWTH, 1983, 61 (03) :695-697

[8] NEW MODEL FOR SLOW CURRENT DRIFT IN INP METAL-INSULATOR-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS [J].

GOODNICK, SM ;

HWANG, T ;

WILMSEN, CW .

APPLIED PHYSICS LETTERS, 1984, 44 (04) :453-455

[9] UNIFIED DISORDER INDUCED GAP STATE MODEL FOR INSULATOR-SEMICONDUCTOR AND METAL-SEMICONDUCTOR INTERFACES [J].

HASEGAWA, H ;

OHNO, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (04) :1130-1138

[10] MESA-TYPE AND PLANAR-TYPE INP METAL-INSULATOR SEMICONDUCTOR FIELD-EFFECT TRANSISTORS WITH PLASMA ANODIC AL2O3 GATE OXIDE [J].

HIRAYAMA, Y ;

KOSHIGA, F ;

SUGANO, T .

THIN SOLID FILMS, 1983, 103 (1-2) :71-76

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