ROTATING-COMPENSATOR-ANALYZER FIXED-ANALYZER ELLIPSOMETER - ANALYSIS AND COMPARISON TO OTHER AUTOMATIC ELLIPSOMETERS

被引：34

作者：

ASPNES, DE

HAUGE, PS

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1976年 / 66卷 / 09期

关键词：

D O I：

10.1364/JOSA.66.000949

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

收藏

页码：949 / 954

页数：6

相关论文

共 40 条

[1] Aspnes D. E., 1973, Optics Communications, V8, P222, DOI 10.1016/0030-4018(73)90132-6
[2] Aspnes D. E., 1976, OPTICAL PROPERTIES S, P799
[3] MEASUREMENT AND CORRECTION OF FIRST-ORDER ERRORS IN ELLIPSOMETRY
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (08) : 1077 - &
[4] OPTIMIZING PRECISION OF ROTATING-ANALYZER ELLIPSOMETERS
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (05) : 639 - 646
[5] PRECISION BOUNDS TO ELLIPSOMETER SYSTEMS
ASPNES, DE
[J]. APPLIED OPTICS, 1975, 14 (05): : 1131 - 1136
[6] HIGH PRECISION SCANNING ELLIPSOMETER
ASPNES, DE
STUDNA, AA
[J]. APPLIED OPTICS, 1975, 14 (01): : 220 - 228
[7] PHOTOMETRIC ELLIPSOMETER FOR MEASURING FLUX IN A GENERAL STATE OF POLARIZATION
ASPNES, DE
[J]. SURFACE SCIENCE, 1976, 56 (01) : 161 - 169
[8] PHOTOMETRIC ELLIPSOMETER FOR MEASURING PARTIALLY POLARIZED-LIGHT
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1975, 65 (11) : 1274 - 1278
[9] EFFECTS OF COMPONENT OPTICAL-ACTIVITY IN DATA REDUCTION AND CALIBRATION OF ROTATING-ANALYZER ELLIPSOMETERS
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (06) : 812 - 819
[10] ANALYSIS OF SYSTEMATIC-ERRORS IN ROTATING-ANALYZER ELLIPSOMETERS
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (11) : 1459 - 1469

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